HPR 20

   HPR-20 R&D

HPR-60-MBMS, A system for analysis of neutrals, radicals and ions      CATLAB-PCS - A system for catalyst characterisation, kinetic and thermodynamic measurements





Residual Gas Analysers for vacuum diagnostics, leak detection and process monitoring.



SIMS Workstation, SIMS Analysers, Ion Guns and TPD Workstation



EQP, PSM - Plasma ion mass/energy analysers. ESPion - Langmuir probe. HPR-100 - Workstation.



IMP- End point detector for ion beam etch. XBS- Flux rate monitor for MBE