HPR-20 R&D
![]() |
CATLAB-PCS - A system for catalyst characterisation, kinetic and thermodynamic measurements |
![]() |
Residual Gas Analysers for vacuum diagnostics, leak detection and process monitoring. |
![]() |
SIMS Workstation, SIMS Analysers, Ion Guns and TPD Workstation |
![]() |
EQP, PSM - Plasma ion mass/energy analysers. ESPion - Langmuir probe. HPR-100 - Workstation. |
![]() |
IMP- End point detector for ion beam etch. XBS- Flux rate monitor for MBE |