Thin-Film Vacuum Deposition Process Equipment

Process Equipment tends to be a 'catch-all' category. We include equipment that measures, records, and controls vacuum processes. We offer Crystal Monitors to measure deposition rate and film thickness; Mass Flow Meters and Controllers for a variety of gasses and condensable vapors; and Power Supplies used for thin film processes including sputtering, plasma etching, and thermal evaporation.

Our new Modular Adaptive Power Supplies (MAPS) line of AC Power Supplies incorporate a modular design that can be tailored to suit a variety of vacuum process applications. Our MAPS Power Supplies are offered in four different configurations: HTR Series for process heating; EVP Series for basic thermal evaporation; LTE Series for low temp organic material evaporation; and HTE Series for high temp metal and inorganic material evaporation.

 

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