Residual Gas Analysers

RGA Series Quadrupole Mass Spectrometers

  • RGA/ Leak Detection
  • Virtual Leaks / Desorption
  • Outgassing studies
  • Bakeout cycles
  • Pump Performance
  • Chamber / Process gas Contaminants

Hiden RGA series quadrupole mass spectrometers for the examination of components present in a vessel or evolved from a process, featuring:

  • PPM Sensitivity, mass range to 300 amu, Remote (PC) or Local Control interface.
  • Stability (less than ±0.5% height variation over 24 h).
  • MASsoft control via RS232, USB or multiple systems via Ethernet LAN.
  • Fast access for Histogram, Trend Analysis and Analog peak displays.
  • Mixed mode scanning e.g. Trend, Histogram and Analog peaks in multiple-windows.
  • Simultaneous real time display of graphical and tabular trend analysis data.
  • Cursor for peak height identification under mouse control.
  • Real time background subtract, Automatic mass scale alignment.
  • Data export facility to ASCII format and to all Windows devices.
  • netMASsoft, an on board web server for RGA operation from your Web browser.


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